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The System status control panel provides an overview of all (software) values of lenses and deflection coils.
The lens values display the currently active lens settings as a percentage of the lens maximum.
The deflection coils values are shown in non-physical units. These values always lie between -1 and +1, except for the pivot points that lie in the range 2-6.
The X-Y values are the values on the X and Y coils, respectively, for the entries listed on the left.
The perpendicular values display the perpendicular corrections applied to the coils. Only one set of perpendicular values exists for a particular deflection coil (thus the shift and tilt components use the same value).
The settings on the deflection coils are first added together. These are then converted by the pivot points into settings applied to upper and lower coils.
The settings on the gun deflection coils consist of the gun tilt, the gun shift and the spot-size dependent gun shift.
The settings on the beam deflection coils consist of four factors, two user factors (user beam shift as set with the track ball, and dark field tilt) and two alignment factors, the align beam shift and the rotation center. Not listed is the contribution from the image shift - beam shift.
The settings on the image deflection coils consist of four main factors, two user factors (user image shift and user diffraction shift) and two alignment factors, the align image shift and align diffraction shift. Additionally there are the magnification correction (used for the alignment of the magnifications within a range), the detector alignment (used for the shift to off-axis detectors) and the cross-over correction (used in EFTEM). Not listed is the contribution from the image shift - beam shift.
Page last modified on 03/28/02
