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OPC-60 Osmium Coater

4-21-06
NOTE:
•This machine uses Osmium tetroxide in the coating process. OsO4 is highly toxic and must be treated as such.
•Only trained users may operate this device.
•Gloves must be worn when using this device.
•Any waste generated from cleaning the chamber surfaces or O-rings must be treated as OsO4 waste.
•Use only as instructed.
•Recharging the Osmium reservoir may be done only by facility staff.
1. Turn on vacuum pump at switch on pump.
2. Turn on OPC Main power switch.
3. Press Evacuate button to pump down the chamber. The light will flash, then stay on as the OPC pumps.
4. The osmium reservoir is in the closed container in the fume hood. Insert Osmium reservoir and adjust knob to the half-way position. Press the OsO4 Evacuate button and allow system to pump to less than 0.9Pa. Shortly after it starts to pump, press the button again. It will now flash until 0.9 Pa has been reached. Wait until OsO4 evacuate button goes out.
5. Put Osmium Reservoir in fully opened position by turning knob all the way in.
6. Press Leak button to vent chamber to atmosphere. Button will flash as the chamber leaks, then stay on for several seconds, and finally goes out.
7. Place samples in chamber using proper spacers. Coating takes place from 1-5 mm above the base electrode. Samples must not touch sides of the wells.
8. Close chamber and select coating thickness (in nanometers).
9. Press Start. The entire process is automatic. The Evacuate button will flash as the chamber is pumped, then it will stay on. When 0.9 Pa is reached, the system will vent a small amount of OsO4 into the chamber, using several vent-pump cycles. When the level is about 6-8 Pa, the system will initiate glow discharge for a pre-determined period. When coating finishes, the chamber will continue to pump until you press Leak. Allow system to pump to less than 0.9Pa before leaking.
10. If you are doing more than one run, repeat steps 7 through 9.
11. If this is the last run, follow steps below for shutdown.
12. Turn Osmium reservoir knob to the halfway position.
13. Press evacuate button and pump chamber.
14. While chamber is pumping, press OsO4 Evacuate button as in step 4 above. Make sure the OsO4 Evacuate light goes out. Put Osmium reservoir to fully closed position and remove. Store in container in hood.
15. Press Leak button and wait for light to go out.
16. Turn off Evacuate button (if on).
17. Turn off main OPC power button.
18. Turn off pump.
19. Clean the teflon spacers. Soak in bleach (under sink) for several minutes. Rinse thoroughly with distilled water and dry before returning to their box.